Multi-modal spectroscopy is the concept of combining several different spectroscopies and thereby expanding the range of analytical capabilities available on one platform. In advanced semiconductor fabrication, the need to streamline production and avoid unnecessary wafer handling makes it quite common to have several different metrologies at one wafer processing station. However, this concept is still not common at the material research or product / process development stages where it is more common to have several different instruments offering different analytical spectroscopies. Besides the obvious benefit of cost reduction, having multiple analytical spectroscopies offers the added benefit of sample co-location so that multiple complementary measurements can be made at the same location of the sample. The benefit of co-location is particularly important as feature sizes gets smaller, from a few microns to nanometers in size.
In this webinar, we show results from a multimodal microspectroscopy system from HORIBA for semiconductor characterization. The so-called SMS system is a modular and flexible system capable of accommodating up to seven different spectroscopies including Raman, Photoluminescence, Time-Resolved Photoluminescence (Lifetime), Reflectance and Transmittance, etc. Furthermore, we show that even when there is a need to perform correlative measurements across different instruments, is it possible to use coordinate system transformation technologies such as navYX from HORIBA to rapidly achieve sample co-location across different measurement platforms.