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Using Multiple Spectroscopies to Characterize Semiconductor Wafers on One Platform
Multi-modal spectroscopy is the concept of combining several different spectroscopies and thereby expanding the range of analytical capabilities available on one platform. In advanced semiconductor fabrication, the need to streamline production and avoid unnecessary wafer handling makes it quite common to have several different metrologies at one wafer processing station. However, this concept is still not common at the material research or product / process development stages where it is more common to have several different instruments offering different analytical spectroscopies. Besides the obvious benefit of cost reduction, having multiple analytical spectroscopies offers the added benefit of sample co-location so that multiple complementary measurements can be made at the same location of the sample. The benefit of co-location is particularly important as feature sizes gets smaller, from a few microns to nanometers in size.

In this webinar, we show results from a multimodal microspectroscopy system from HORIBA for semiconductor characterization. The so-called SMS system is a modular and flexible system capable of accommodating up to seven different spectroscopies including Raman, Photoluminescence, Time-Resolved Photoluminescence (Lifetime), Reflectance and Transmittance, etc. Furthermore, we show that even when there is a need to perform correlative measurements across different instruments, is it possible to use coordinate system transformation technologies such as navYX from HORIBA to rapidly achieve sample co-location across different measurement platforms.

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Speakers

Dr. Francis Ndi
Global Product Line Manager @HORIBA Scientific
Dr. Ndi is the Global Product Line Manager for the custom spectroscopy solutions division (OSD) at HORIBA Scientific. The custom spectroscopy solutions unit specializes in offering modular and flexible spectroscopy solutions for needs not readily met with standard systems. These solutions range from components such as spectrometers and CCD detectors to full turnkey systems. Dr. Ndi joined HORIBA in the role of Applications Scientist. He has also held roles in the export business of the company.
Mark Andrews
Moderator
Mark Andrews is technical editor for Angel Business Communications. Prior to joining Angel Business Communications in 2014 he was strategic marketing manager for TriQuint (now Qorvo). Marks experience focuses on RF and photonic solutions for infrastructure, mobile device, aerospace, aviation and defence industries.